Abstract
Using SEM and EDX, we observed the conversion of the HMDS molecule to the HMDSO molecule as a result of contact with moisture or water. We prepared the samples by incubating them for 8 to 24 h at room temperature in moisture and moisture-free environments. After gradual imaging of the samples, the formation stages of the HMDSO molecule were observed.
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Kapsamı
Uluslararası
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Type
Hakemli
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Index info
WOS.SCI
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Language
English
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Article Type
None
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Keywords
HMDS HMDSO SEM In situ Reaction